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Item ID |
Short Description |
Product Type / Details |
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Price |
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Model |
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176520
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Wavemat |
Diamond 915MHz MPCVD |
in Plasma CVD Tools (MPCVD, PECVD, ECR-CVD)
Wavemat 915MHz MPCVD Diamond Growth System:Cline Innovations is offering a Wavemat 915MHz microwave CVD diamond growth system. This deposition system is recommended for CVD diamond and/or large area plasma equipment development purposes. This system is capable of operation over a broad parametric space including 1.) large volume/diameter, low plasma power densities using a thermally-floating stage design or 2.) confined volume/diameter higher plasma power densities using a water-cooled stage design. Major System Features: - Wavemat 915MHz internally-tunable microwave plasma apparatus.
- Nominally 10-inch diameter fused quartz bell jar enables handling of large area fixtures and substrates.
- Roughly 4.5" processing diameter with water-cooled stage.
- Roughly 6.0" processing diameter with thermally-floating stage.
- Larger area processing may certainly be possible with system modifications, enhanced cooling.
- Double-jacketed stainless steel loading chamber mounted to a sturdy welded steel frame with thick aluminum tabletop.
- Typically operated at power levels under 12kW.
- Modular design enables application-specific modifications, plasma source development, etc.
- PC-based LabView controls.
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184607
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Astex |
AX5000, AX6000, AX6350 or similar |
in Plasma CVD Tools (MPCVD, PECVD, ECR-CVD)
Astex AX5000 Microwave Plasma Diamond Growth System:- Cline Innovations has all components necessary to refurbish and reintegrate a 5kW Astex MPCVD system for R&D or limited production.
- System can be rebuilt based on customer's application needs using a combination of reliable, new and used/refurbished components.
- Alternatively, a kit of core components can be offered for skilled users interested in building their own system.
- This general system type enables growth of nanocrystalline. polycrystalline, or single crystal diamond (SCD) depending on configuration and operating conditions.
- 1.5kW to 5kW microwave power input.
- 3 stage options: Cooled, Heated, or Thermally Floating.
- Integration with computer controls is strongly recommended.
- Chamber designs vary by vintage, but can be confirmed at the time of quotation.
- Please note that the chamber shown in the attached image is a new chamber. The most typical configuration involves the use of a used, professionally-refurbished double-jacked, water cooled chamber of the same general AX5000 design.
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