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Plasma CVD Tools (MPCVD, PECVD, ECR-CVD)


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Group Listings into sub-categories under Plasma CVD Tools (MPCVD, PECVD, ECR-CVD)Group Listings into sub-categories under Plasma CVD Tools (MPCVD, PECVD, ECR-CVD)

List all 3 product types under Plasma CVD Tools (MPCVD, PECVD, ECR-CVD)List all 3 product types under Plasma CVD Tools (MPCVD, PECVD, ECR-CVD)
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 Offered (box) or Wanted (coins)  Item ID  Short Description Product Type / Details # Price Notes
Make Model
  $  
184607

Astex  

AX5000, AX6000, AX6350 or similar 

List all items of this typeSingle Chamber PECVD Tools

in Plasma CVD Tools (MPCVD, PECVD, ECR-CVD)

Astex AX5000 Microwave Plasma Diamond Growth System:
  • Cline Innovations has all components necessary to refurbish and reintegrate a 5kW Astex MPCVD system for R&D or limited production.
  • System can be rebuilt based on customer's application needs using a combination of reliable, new and used/refurbished components.
  • Alternatively, a kit of core components can be offered for skilled users interested in building their own system.
  • This general system type enables growth of nanocrystalline. polycrystalline, or single crystal diamond (SCD) depending on configuration and operating conditions.
  • 1.5kW to 5kW microwave power input.
  • 3 stage options: Cooled, Heated, or Thermally Floating.
  • Integration with computer controls is strongly recommended.
  • Chamber designs vary by vintage, but can be confirmed at the time of quotation.
  • Please note that the chamber shown in the attached image is a new chamber.  The most typical configuration involves the use of a used, professionally-refurbished double-jacked, water cooled chamber of the same general AX5000 design.
 1   F*
176520

Wavemat  

Diamond 915MHz MPCVD 

List all items of this typeSingle Chamber PECVD Tools

in Plasma CVD Tools (MPCVD, PECVD, ECR-CVD)

Wavemat 915MHz MPCVD Diamond Growth System:

Cline Innovations is offering a Wavemat 915MHz microwave CVD diamond growth system.  This deposition system is recommended for CVD diamond and/or large area plasma equipment development purposes. 

This system is capable of operation over a broad parametric space including 1.) large volume/diameter, low plasma power densities using a thermally-floating stage design or 2.) confined volume/diameter higher plasma power densities using a water-cooled stage design.  

Major System Features:

  • Wavemat 915MHz internally-tunable microwave plasma apparatus.
  • Nominally 10-inch diameter fused quartz bell jar enables handling of large area fixtures and substrates.
    • Roughly 4.5" processing diameter with water-cooled stage.
    • Roughly 6.0" processing diameter with thermally-floating stage.
    • Larger area processing may certainly be possible with system modifications, enhanced cooling.
  • Double-jacketed stainless steel loading chamber mounted to a sturdy welded steel frame with thick aluminum tabletop.
  • Typically operated at power levels under 12kW.
  • Modular design enables application-specific modifications, plasma source development, etc.
  • PC-based LabView controls.
 1   F*


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

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