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Manufacturer Model Wafer Size Range Minimum Wafer Size Range Maximum Wafer Size Range Set Size Number of Chambers Process Capabilities Chamber 1 Description Chamber 2 Description Chamber 3 Description Chamber 4 Description Chamber 5 Description Chamber 6 Description Controller Type	Software Revision Level Interface Type Elevator Type Temperature Control Reduced Pressure Process Gases External Cooling Accessories Other Information Extended Description Power Requirements Voltage Power Requirements Amps Power Requirements Amps 2 Power Requirements Frequency	Power Requirements Phase Operating Air Pressure Air Consumption Cooling Water Reqd Minimum Flow Cooling Water Reqd Minimum Temperature Cooling Water Reqd Maximum Temperature CE Marked Year of Manufacture Refurbished Condition Exterior Dimensions Width Exterior Dimensions Depth Exterior Dimensions Height Weight