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Manufacturer Model Wafer Size Range Minimum Wafer Size Range Maximum Wafer Size Range Set Size Process Controller Type Software Revision Level Interface End Point Detection Cassette to Cassette Loadlock Loadlock Yes/No Loadlock Loadlock Pump Manufacturer & Model Loadlock Loadlock Soft Pump Loadlock Loadlock Soft Vent	High Vacuum Pump Roughing Pump RF Generator Model Automatch Text Number of Gas Inputs Process Gases Chillers Number of Chillers Chillers Chiller #1Manufacturer/Model Chillers Chiller #2 Manufacturer/Model Chillers Chiller #3 Manufacturer/Model Accessories Other Information Extended Description Power Requirements Voltage Power Requirements Amps	Power Requirements Frequency Power Requirements Phase Operating Air Pressure Air Consumption Vacuum Required CE Marked Year of Manufacture Refurbished Condition Exterior Dimensions Width Exterior Dimensions Depth Exterior Dimensions Height Weight