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Manufacturer Model Description Vacuum System Load Lock Included E Beam Power Supply Power Supply Type E Beam Power Supply High Voltage Minimum E Beam Power Supply High Voltage Maximum E Beam Power Supply Process Control Voltage Minimum E Beam Power Supply Process Control Voltage Maximum E Beam Power Supply Number of Guns Controlled E Beam Power Supply Lateral/Longitudinal Beam Sweep E Beam Power Supply Electron Source Type E Beam Power Supply Crucible Size	RF Generator Manufacturer RF Generator Model RF Generator Rated Power Output RF Generator Frequency RF Generator Matching Network Vacuum System Gas Inputs Gas Input Control Substrate Heaters Film Thickness Monitor Residual Gas Analyzer Accessories Other Information Extended Description	Power Requirements Voltage Power Requirements Amps Power Requirements Amps 2 Power Requirements Frequency Power Requirements Phase CE Marked Year of Manufacture Refurbished Condition Exterior Dimensions Width Exterior Dimensions Depth Exterior Dimensions Height Weight