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Manufacturer Model Description Vacuum System Vacuum System Load Lock Included Number of Cathodes Target Size Quantity of DC Cathodes Quantity of RF Cathodes Number of RF Etch Cathodes Gas Inputs Gas Input Control	Substrate Heaters Residual Gas Analyzer DC Power Supply Manufacturer DC Power Supply Model DC Power Supply Output Power RF Generator Manufacturer RF Generator Model RF Generator Rated Power Output RF Generator Frequency RF Generator Matching Network Accessories Other Information Extended Description	Power Requirements Voltage Power Requirements Amps Power Requirements Amps 2 Power Requirements Frequency Power Requirements Phase CE Marked Year of Manufacture Refurbished Condition Exterior Dimensions Width Exterior Dimensions Depth Exterior Dimensions Height Weight